Thermogravimetry (TG) and differential thermal analysis (DTA) were used to investigate the oxidation behavior of Ru/TiO2 and metallic Ru fine particles during heating in air in the range 20-1000 degrees C. Temperature ranges of the oxidation for two samples of Ru/TiO2 with the compositions (92 wt% Ru, 8 wt% TiO2) and (75 wt% Ru, 25 wt% TiO2) and for pure metallic Ru fine particle agglomerates were determined. It was assumed that after the partial oxidation of Ru in the sample containing 75 wt% Ru and 25 wt% TiO2 and in the pure metallic Ru a diffusion barrier was formed, preventing further oxidation of Ru in Ru/RuO2 and Ru/RuO2/TiO2 matrices. XRD and TEM were used for the sample characterization.