In the present study, the nucleation and growth kinetics of the L1(0) ordered domains in FePt thin films were studied by using X-ray diffraction (XRD) measurements combined with transmission electron microscopy (TEM). A small nucleation activation energy En = (0.5 +/- 0.1) eV and a relatively large growth activation energy Eg = (0.9 +/- 0.1) eV for the L1(0) ordered domains are separately determined. The high ratio Eg/En > 1 yields an understanding of a high L1(0) ordering temperature for the FePt thin films used for magnetic recording media.