Enhanced dielectric properties of nanocrystalline (Ba0.65Sr0.35)TiO3 thin films grown on CaRuO3 buffer layers

H F Xiong; X G Tang; L L Jiang; H L W Chan

doi:10.1166/jnn.2009.1235

Enhanced dielectric properties of nanocrystalline (Ba0.65Sr0.35)TiO3 thin films grown on CaRuO3 buffer layers

J Nanosci Nanotechnol. 2009 Oct;9(10):5834-8. doi: 10.1166/jnn.2009.1235.

Authors

H F Xiong¹, X G Tang, L L Jiang, H L W Chan

Affiliation

¹ School of Physics and Optoelectric Engineering, Guangdong University of Technology, Guangzhou Higher Education Mega Center, Guangzhou 510006, People's Republic of China.

PMID: 19908461
DOI: 10.1166/jnn.2009.1235

Abstract

Highly (100)-oriented and (110)-oriented (Ba0.65Sr0.35)TiO3 (BSTO) and (Ba0.65Sr0.35)TiO3/CaRuO3 (BSTO/CRO) heterostructure thin films, have been grown on Pt/Ti/SiO2/Si substrates prepared by pulsed laser deposition (PLD). The structure and surface morphology of the films have been characterized by X-ray diffraction (XRD) and scanning electron microscope (SEM). The dielectric constants of the films changes significantly with applied dc bias field and have high tunability of 76.3% and 78.1% at an applied field of 256.3 kV/cm, respectively for BSTO and BSTO/CRO thin films on Pt/Ti/SiO2/Si substrates. The tunability of the BSTO/CRO heterostructure thin films on Pt/Ti/SiO2/Si substrate was higher than that of the BSTO thin films on Pt/Ti/SiO2/Si substrate. The high tunability has been attributed to the (110) texture of the films and lager grain sizes.