Flexible integrated photonic sensors are gaining prominence in intelligent wearable sensing due to their compact size, exceptional sensitivity, rapid response, robust immunity to electromagnetic interference, and the capability to enable parallel sensing through optical multiplexing. However, integrating these sensors for practical applications, such as monitoring human motions and physiological activities together, remains a significant challenge. Herein, it is presented an innovative fully packaged integrated photonic wearable sensor, which features a delicately designed flexible necklace-shaped microring resonator (MRR), along with a pair of grating couplers (GCs) coupled to a fiber array (FA). The necklace-shaped MRR is engineered to minimize waveguide sidewall-induced scattering loss, with a measured intrinsic quality factor (Qint) of 1.68 × 105, ensuring highly sensitive and precise signal monitoring. GCs and FA enhance the seamless wearability of devices while maintaining superior sensitivity to monitor various human motions and physiological signs. These are further classified signals using machine learning algorithms, achieving an accuracy rate of 97%. This integrated photonic wearable sensor shows promise for human-machine interfaces, touch-responsive wearable monitors, and artificial skin, especially in environments susceptible to electromagnetic interference, such as intensive care units (ICUs) and spacecraft. This work significantly advances the field of smart wearable technology.
Keywords: flexible sensor; full‐packaged solution; machine learning algorithms; necklace‐shaped microring resonator; wearable sensing.
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